BOOK
Frontiers of Thin Film Technology
Stephen M. Rossnagel | Abraham Ulman | Maurice H. Francombe
(2000)
Additional Information
Book Details
Abstract
Frontiers of Thin Film Technology, Volume 28 focuses on recent developments in those technologies that are critical to the successful growth, fabrication, and characterization of newly emerging solid-state thin film device architectures.
Volume 28 is a condensed sampler of the Handbook for use by professional scientists, engineers, and students involved in the materials, design, fabrication, diagnostics, and measurement aspects of these important new devices.