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Abstract
The subject matter of thin-films – which play a key role in microelectronics – divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship.
Part II of 'Materials Science in Microelectronics' focuses on the latter of these relationships, examining the effect of structure on the following:
• Electrical properties
• Magnetic properties
• Optical properties
• Mechanical properties
• Mass transport properties
• Interface and junction properties
• Defects and properties
- Captures the importance of thin films to microelectronic development
- Examines the cause / effect relationship of structure on thin film properties