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Book Details
Abstract
Deep implants are produced by the high-energy implantation of impurities in a host material. The thus created subsurface layers have properties that are different from the very surface and the bulk and show great promise for application in the electronics industry.
...should be studied carefully by all involved in ion implantation...
Nuclear Instruments and Methods in Physics Research
...reflects the vitality of an emerging research field...
MRS Bulletin