Abstract

Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition techniques using organometallic source molecules. Of interest to researchers, students, and people in the semiconductor industry, this book provides a basic foundation for understanding the technique and the application of OMVPE for the growth of both III-V and II-VI semiconductor materials and the special structures required for device applications. In addition, a comprehensive summary detailing the OMVPE results observed to date in a wide range of III-V and II-VI semiconductors is provided. This includes a comparison of results obtained through the use of other epitaxial techniques such as molecular beam epitaxy (MBE), liquid-phase epitaxy (LPE), and vapor phase epitaxy using halide transport.
This book, written by a true expert in the field of growing semiconductors, provides an up-to-date summary of the current state of understanding of the principles, the problems as well as the latest developments in organometallic vapor-phase epitaxy (OMVPE)...this book should be exceedingly useful to anyone interested in OMVPE and is a welcome addition to the library. The author must be complimented for sharing his knowledge and understanding of the OMVPE process with the scientific community.
--JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
This book, written by one of the major contributors to OMVPE, definitely shows that it should be treated like a Science even if it is performed by artists...After a short historical introduction, the first part deals with the organometallic molecules which are used or could be used in OMVPE...The second part is the heart of the book. The author takes us step by step into the complicated epitaxial process which is controlled by Thermodynamics, Kinetics, Hydrodynamics, and Mass transport...The third part is a review of the achievements of OMVPE in terms of materials, microstructures, and devices. This is an excellent book which will benefit both the achievements of OMVPE in terms of materials, microstructures, and devices...This is an excellent book which will benefit both the experienced OMVPE crystal grower (as a reference book) and the newcomer (as an educational tool)....This book contains a wealth of information.
--PHYSICS IN CANADA
I highly recommend this text as a primary reference...Stringfellow's OMVPE: Theory and Practice is one of the first'good books' in this field.
--MRS BULLETIN