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Sami Franssila
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Book
Handbook of Silicon Based MEMS Materials and Technologies
Markku Tilli
Mervi Paulasto-Krockel
Veli-Matti Airaksinen
Sami Franssila
Markku Tilli
Veikko Lindroos
Ari Lehto
Teruaki Motooka
Veikko Lindroos
(2009)
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